The Atomic Layer Deposition technique is especially suited for formation of conformal coating of pinhole free films on surfaces with complex geometrical shapes, an architecture most commonly adopted for micro battery designs. Realization of all solid state Li-ion microbatteries should therefore be close at hand, however, no fully functional all solid state ALD-type battery is yet demonstrated. Deposition of Li-containing materials by the ALD technique has proven to be challenging both from a practical and analytical point of view, but progress is being made. The field has advanced significantly within the last few years and electroactive materials suitable as cathode, electrolyte and anode have been demonstrated with examples of record breaking properties. The present contribution will give an overview of ALD-type deposition of functional battery materials with the aim of developing all-solid-state batteries.
Atomic layer deposition in a battery perspective
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